Dielectric Barrier Discharge Reactor for making Disilane, Trisilane and Tetrasilane from Silane

摘要

invention disilane and trisilane and tetrasilane of producing a dielectric barrier for It relates to a discharge reaction device, and more particularly, di-silane in silane as well as trisilane, tetrasilane in a reaction device which can be manufactured in a continuous process, the reactor interior and a discharge electrode that is connected to the high-frequency devices, this external The configuration around the inside of the porous tubes, the material of the discharge electrode, by adjusting the distance of the discharge electrode and the porous tubes, silane from disilane, trisilane, tetrasilane disilane the continuous production of a high yield, while having a possible is related to the dielectric barrier discharge reactor for the production of tetra-and trisilane and silane. ;