HYDROGEN LEAKAGE INSPECTION SYSTEM AND METHOD USING QUARTZ CRYSTAL MICROBALANCE

摘要

The present invention relates to a hydrogen leakage inspection system using a quartz crystal microbalance (QCM) and a leakage inspection method thereof, and more specifically, to a hydrogen leakage inspection system to detect the leakage of hydrogen flowing in a hydrogen supply pipe, comprising: a QCM (100) having a platinum layer, a quartz resonator placed under the platinum layer and having a gold electrode surface, a quartz resonator holder being in contact with the edge of the quartz resonator and having one surface to which a platinum resistance temperature sensor is attached, a peltier device to control the temperature of the platinum layer and the quartz resonator, and a frequency measurement circuit wire to connect the platinum layer and the crystal resonator to the outside; and an integrated control part (200) to detect and determine the leakage of hydrogen using the resonance frequency variation of the quartz resonator received from the frequency measurement circuit wire. The present invention determines the leakage of the hydrogen in accordance with the natural frequency variation of the quartz resonator using the QCM, has high sensitivity to the hydrogen through the quartz resonator with the platinum layer, and easily attaches and detaches the hydrogen condensed on the surface.