METHOD OF FORMING pads To YBa2Cu3O7-x film

摘要

A method of forming on the dielectric substrate to pads YBaCuOplenkam, wherein the contact pads are formed prior to application of films YBaCuOna dielectric substrate, characterized in that the heating is the target and the substrate to a temperature T = 450-500 ° C, spraying pad of Au (gold) is performed by laser sputtering target made of solid gold pulsed laser with a wavelength of λ = 1,06 microns, a pulse duration of τ = 10 ÷ 20 ns, and pulse repetition frequency ν = 10 Hz, power density laser rad cheniya P = (5 ÷ 7) · 10W / cm, the dielectric substrate is set at a distance L = 4-6 mm from the gold target at a pressure in the vacuum chamber r = 0.1 ÷ 0.5 Pa.