METHOD FOR SIMULTANEOUS FORMATION FOR BILATERAL dielectric substrate thin films YBa2Cu3O7-x

摘要

A method of forming superconducting film structures of YBaCuO material on both sides of the substrate by laser ablation, characterized in that the substrate is rotated so that each side of the substrate are alternately directed to the target YBaCuOv for a time τ = 5 ÷ 7, when the distance to the target L = 25 ÷ 30 mm.