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MINIATURIZED INTEGRAL DIAGRAM OF THE MATRIX OF OPTICAL SENSORS EXECUTED BY THE PRINCIPLES OF MICROELECTROMECHANICAL SYSTEMS (MEMS)

机译:微机电系统(MEMS)原理执行的光学传感器矩阵的最小化积分图

摘要

1. A device for recording dynamic changes, such as mass or viscosity, comprising: a disposable cartridge having at least one microelectromechanical sensor, at least one light source connected to at least one microelectromechanical sensor, at least at least one photodetector connected to at least one microelectromechanical sensor and a light source, and control electronics connected to at least one activation means, at least one means Activation can be connected releasably to at least one MEMS sensor and wherein the control electronics and user interface can be connected releasably to at least one fotodetektoru.2. The device according to claim 1, wherein the at least one light source is a single laser source and the at least one photodetector is a single photodetector. The device according to claim 1, wherein the at least one microelectromechanical sensor comprises at least one vibrating structure for recording and interference means associated with each vibrating mechanical structure. The device of claim 1, wherein the at least one microelectromechanical sensor comprises at least one vibrating structure for recording and interference means associated with at least one vibrating mechanical structure and a substrate having a through hole for each mechanical structure so that the light source can pass through the substrate to the mechanical
机译:1.一种用于记录诸如质量或粘度之类的动态变化的设备,包括:具有至少一个微机电传感器的一次性盒,连接至至少一个微机电传感器的至少一个光源,至少与至少一个光电探测器连接的至少一个光电探测器。一个微机电传感器和光源,以及连接至至少一个激活装置的控制电子装置,至少一个装置激活装置可释放地连接至至少一个MEMS传感器,并且其中控制电子装置和用户界面可释放地连接至至少一个fotodetektoru.2。 2.根据权利要求1所述的装置,其中,所述至少一个光源是单个激光源,并且所述至少一个光电检测器是单个光电检测器。 2.根据权利要求1所述的装置,其中,所述至少一个微机电传感器包括至少一个振动结构,用于记录和与每个振动机械结构相关联的干扰装置。 2.根据权利要求1所述的装置,其中,所述至少一个微机电传感器包括:至少一个振动结构,用于与至少一个振动机械结构相关联的记录和干涉装置;以及基板,所述基板具有用于每个机械结构的通孔,使得所述光源可以通过。通过基材到机械

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