MEMS MINIATURIZED INTEGRATED MICRO ELECTO-MECHANICAL SYSTEMS MEMS OPTICAL SENSOR ARRAY

摘要

The present invention describes a method and apparatus for driving and multiplexing sensing using an array of sensing elements. The present invention can be used for label-free detection of biological and chemical agents in robust and miniaturized packages. The present invention integrates photonics, CMOS electronics and micro / nano system technology and allows multi-analyte detection in the same package. A preferred driving method is to use a magnetic thin film and the preferred sensing method is optical using interference means.