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MINIATURIZED INTEGRATED MICRO ELECTO-MECHANICAL SYSTEMS (MEMS) OPTICAL SENSOR ARRAY FOR VISCOSITY AND MASS DETECTION
MINIATURIZED INTEGRATED MICRO ELECTO-MECHANICAL SYSTEMS (MEMS) OPTICAL SENSOR ARRAY FOR VISCOSITY AND MASS DETECTION
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机译:用于粘度和质量检测的微型集成式微机电系统(MEMS)光学传感器阵列
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摘要
The present invention relates generally to the field of chemical and biological sensors and in particular to micro electro-mechanical systems (MEMS) sensors for measuring fluid viscosity and detection of minute amounts of chemicals and biological agents in fluids. It is an object of the present invention to provide a sensor that will work in disposable cartridges with remote sensing that can measure dynamic changes of the functionalized cantilevers in liquid and gas environment.
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