METHOD OF OBTAINING TWO-PHASE NANOCOMPOSITE COATING, CONSISTING OF TITANIUM CARBIDE NANOCLUSTERS, DISTRIBUTED IN AMORPHOUS MATRIX, ON PRODUCTS FROM HARD ALLOYS

摘要

FIELD: chemistry.SUBSTANCE: invention relates to field of obtaining nanocomposite coatings and can be used in creation of optic microelectronic devices and materials with increased corrosion resistance and wear resistance. Method of obtaining two-phase nanocomposite coating, consisting of titanium carbide nanoclusters, distributed in amorphous hydrocarbon matrix, on products from hard alloys, includes application of adhesive titanium or chromium sublayer, magnetron sputtering of titanium target in gas mixture of acetylene and argon under pressure 0.01-1 Pa and precipitation of dispersed particles of target and carbon-containing radicals on product surface in combination with bombardment of surface with ions, accelerated by bias voltage, with product surface being subjected to purification with argon ions from plasma, generated by electronic beam, before application of adhesive sublayer, and gas mixture being activated in the process of coating application by impact with beam of electrons with energy 100 eV.EFFECT: invention is aimed at increase of coating adhesion and micro-hardness of obtained products, as well as at provision of high efficiency of application of acetylene in the process of coating application.1 ex, 2 dwg