A method for calibrating a simulations - or design method of designing or producing a mask or for the production of a component

摘要

A method for calibrating a simulation process for simulating of at least one stage of a component in the case of a first and a second predetermined condition, with the following steps:Generating (101) a first prestructure (31) in the case of the first predetermined condition;Generating (102) of a first structure (21) by means of the first prestructure (31);Generating (103) of a second prestructure (32, 33) in the case of the second predetermined condition;Generating (104) a second structure (22, 23) by means of the second prestructure (32, 33);Measuring (105) of at least one first parameter to the first prestructure (31), in order to obtain a first characterization value;Measuring (106) of at least one second parameter to the first structure (21), in order to obtain a second characterizing value;Measuring (107) of at least the second parameter to the second structure (22, 23), in order to obtain a third characterization value;Determining (108) of a relationship between at least the first parameter and the second parameter on the basis of at least the first characterization value and of the second characterizing value;Determining (109) an estimate of the first parameter to the second prestructure (32, 33) on the basis of the third characterization value and the relation;Calibrating (110) of the simulation process on the basis of the first characterization value and the estimate.