MEMS / NEMS DEVICE COMPRISING AN ELECTROSTATICALLY ACTUATED RESONATOR NETWORK AND AN ADJUSTABLE FREQUENCY RESPONSE, IN PARTICULAR FOR BANDPASS FILTER

摘要

The subject of the invention is an adjustable frequency response MEMS / NEMS device comprising a set of electrostatically actuated resonators, an electrostatic actuation circuit of said resonators, electrical detection means, and means for adjusting the frequency response of the resonator. set of said resonators characterized in that: - said device comprises at least one network of n resonators having a moving part, said n resonators being connected in series between a first bias potential VB and a second bias potential VB2, each ith resonator being biased at a potential Vi; said electrostatic actuation circuit of said resonators comprising for each resonator an actuating electrode facing said moving part of the resonator, all of said actuating electrodes being connected in parallel with a common control potential VIN, the voltage of actuation of each ith resonator being equal to VIN-Vi; said detection means comprising a detection output common to said n resonators connected to an output potential Vout; said means for adjusting the frequency response, varying said common control potential and / or at least one of the bias potentials.