Active vibration isolation device based on electromagnetic and aerostatic floatation

摘要

An active vibration isolation device based on electromagnetic and aerostatic floatation, which is essential for the super-precision measurement and manufacture, mainly consists of an isolation platform(l), an intermediate sleeve(2) and a base(3). The isolation platform(l) supports any object(s) placed on the platform(l) and is supported by the intermediate sleeve(2). And the intermediate sleeve(2) is supported on the base(3) which is fixed on the ground. With the combination of electromagnetic and aerostatic floatation, the device achieves large bearing capacity while excellent vibration isolation performance is maintained. Besides, the device also realizes automatic control of stiffness using closed-loop speed control methods and imposes an excellent inhibitory action on the vibration originating from surroundings and the platform(l) itself.