PZT-based ferroelectric thin film-forming composition, method of preparing the same, and method of forming PZT-based ferroelectric thin film using the same

摘要

In a PZT-based ferroelectric thin film-forming composition, a ratio of a PZT precursor to 100 wt% of the composition is 17 to 35 wt% in terms of oxides, a of a diol to 100 wt% of the composition is 16 to 56 wt%, a ratio of a polyvinyl pyrrolidone or a polyethylene glycol to 1 mol of the PZT precursor is 0.01 to 0.25 mol in terms of monomers, a ratio of the water to 1 mol of the PZT precursor is 0.5 to 3 mol, and the composition does not further contain a linear monoalcohol having 6 to 12 carbon chains which has a ratio of 0.6 to 10 wt% with respect to 100 wt% of the composition.