PZT-based ferroelectric thin film-forming composition, method of preparing the same, and method of forming PZT-based ferroelectric thin film using the same

摘要

This PZT-based ferroelectric thin film-forming composition comprises: a PZT precursor; a diol; one of polyvinyl pyrrolidones and a polyethylene glycol; water; and a linear monoalcohol having 6 to 12 carbon chains. In this composition, a concentration of the PZT precursor in 100 wt% of the composition is 17 wt% to 35 wt% in terms of oxides, the ratio of the diol to 100 wt% of the composition is 16 wt% to 56 wt%, the ratio of the one of the polyvinyl pyrrolidones and the polyethylene glycol to 1 mol of the PZT precursor is 0.01 mol to 0.25 mol, the ratio of the water to 1 mol of the PZT precursor is 0.5 mol to 3 mol, and the ratio of the linear monoalcohol to 100 wt% of the composition is 0.6 wt% to 10 wt%.