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TEMPERATURE MEASUREMENT METHOD FOR ULTRAVIOLET TRANSMITTANCE MEMBER, TEMPERATURE MEASUREMENT DEVICE FOR ULTRAVIOLET TRANSMITTANCE MEMBER, AND LIGHT SOURCE DEVICE
TEMPERATURE MEASUREMENT METHOD FOR ULTRAVIOLET TRANSMITTANCE MEMBER, TEMPERATURE MEASUREMENT DEVICE FOR ULTRAVIOLET TRANSMITTANCE MEMBER, AND LIGHT SOURCE DEVICE
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机译:紫外线透射构件的温度测量方法,紫外线透射构件的温度测量装置以及光源装置
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摘要
Provided is a temperature measurement method, a temperature measurement device, and the like which are capable of measuring the temperature of an ultraviolet light transmittance member by using a concise configuration. One aspect exemplifying the present invention is a temperature measurement device for measuring the temperature of an ultraviolet light transmittance member transmitting ultraviolet light. The temperature measurement device (2) includes a spectroscopic measurement unit (20) for detecting the intensity distribution of the ultraviolet light (UV1) transmitted through the ultraviolet light transmittance member; and a calculation processing unit (25) for obtaining the absorption edge wavelength of the ultraviolet light transmittance member from the intensity distribution of the ultraviolet light detected by the spectroscopic measurement unit (20), and deriving the temperature of the ultraviolet light transmittance member on the basis of the obtained absorption edge wavelength.
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