首页> 外国专利> TEMPERATURE MEASUREMENT METHOD FOR ULTRAVIOLET TRANSMITTANCE MEMBER, TEMPERATURE MEASUREMENT DEVICE FOR ULTRAVIOLET TRANSMITTANCE MEMBER, AND LIGHT SOURCE DEVICE

TEMPERATURE MEASUREMENT METHOD FOR ULTRAVIOLET TRANSMITTANCE MEMBER, TEMPERATURE MEASUREMENT DEVICE FOR ULTRAVIOLET TRANSMITTANCE MEMBER, AND LIGHT SOURCE DEVICE

机译:紫外线透射构件的温度测量方法,紫外线透射构件的温度测量装置以及光源装置

摘要

Provided is a temperature measurement method, a temperature measurement device, and the like which are capable of measuring the temperature of an ultraviolet light transmittance member by using a concise configuration. One aspect exemplifying the present invention is a temperature measurement device for measuring the temperature of an ultraviolet light transmittance member transmitting ultraviolet light. The temperature measurement device (2) includes a spectroscopic measurement unit (20) for detecting the intensity distribution of the ultraviolet light (UV1) transmitted through the ultraviolet light transmittance member; and a calculation processing unit (25) for obtaining the absorption edge wavelength of the ultraviolet light transmittance member from the intensity distribution of the ultraviolet light detected by the spectroscopic measurement unit (20), and deriving the temperature of the ultraviolet light transmittance member on the basis of the obtained absorption edge wavelength.
机译:提供一种能够通过使用简洁的结构来测量紫外线透射部件的温度的温度测量方法,温度测量装置等。举例说明本发明的一个方面是一种用于测量透射紫外线的紫外线透射构件的温度的温度测量装置。温度测量装置(2)包括光谱测量单元(20),该光谱测量单元用于检测透射通过紫外线透射构件的紫外线(UV1)的强度分布。计算处理单元(25),用于从由光谱测量单元(20)检测到的紫外光的强度分布中获得紫外光透射部件的吸收边缘波长,并推导紫外透射部件上的温度。获得的吸收边缘波长的基础。

著录项

  • 公开/公告号EP3088858A4

    专利类型

  • 公开/公告日2017-08-23

    原文格式PDF

  • 申请/专利权人 NIKON CORPORATION;

    申请/专利号EP20140874513

  • 发明设计人 MIZUGUCHI MASAFUMI;

    申请日2014-12-26

  • 分类号G01K11/12;G01N21/33;

  • 国家 EP

  • 入库时间 2022-08-21 14:05:30

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