SIGNAL CHARGED PARTICLE DEFLECTION DEVICE, SIGNAL CHARGED PARTICLE DETECTION SYSTEM, CHARGED PARTICLE BEAM DEVICE AND METHOD FOR DETECTING SIGNAL CHARGED PARTICLE BEAM

摘要

PROBLEM TO BE SOLVED: To provide a signal charged particle deflection device for a charged particle beam device.SOLUTION: A signal charged particle deflection device includes a beam bender (100) configured to deflect a signal charged particle beam. The beam bender includes a first electrode (110) and a second electrode (120) providing an optical path for the signal charged particle beam between the first and second electrodes. The first electrode (110) has a first cross section in a plane that is vertical to the optical path, and the second electrode (120) has a second cross section in the plane that is vertical to the optical path. A first portion of the first cross section and a second portion of the second cross section provide the optical path between the first and second portions, and the first portion and the second portion have shapes different from each other.SELECTED DRAWING: Figure 3A