NON-CONTACT SURFACE SHAPE MEASUREMENT METHOD AND DEVICE USING WHITE LIGHT INTERFEROMETER OPTICAL HEAD

摘要

PROBLEM TO BE SOLVED: To allow a correct spatial sampling to improve measurement accuracy, make processing efficient, and improve reliability even when using drive means of which a movement velocity is not constant.SOLUTION: In a non-contact surface shape measurement method using a white light interferometer optical head 10 configured to: divide light irradiated from a white light source 12 by a beam splitter 16 into reference light to a reference mirror 20 and measurement light to a measurement object surface (W); and acquire an interference fringe image generated by an optical path difference between the light reflected upon the reference mirror and the measurement object surface, in which the interference fringe image is acquired while scanning the white light interferometer optical head 10 in a vertical direction with respect to the measurement object surface (W), the method is configured to: move the white light interferometer optical head 10 in a scan direction, and detect the scan direction; and acquire the interference fringe image for each prescribed position interval of the scan direction.SELECTED DRAWING: Figure 4