AUTOMATIC LIGHT ADJUSTMENT METHOD TO BE USED IN OPTICAL INSPECTION AND OPTICAL INSPECTION DEVICE FOR OPTICAL INSPECTION

摘要

PROBLEM TO BE SOLVED: To provide an automatic light adjustment method that is used in an optical inspection stable in inspection quality of a circuit substrate, and to provide an optical inspection device for optical inspection.;SOLUTION: An automatic light adjustment method of making automatic adjustments of an irradiation light source among many kinds of measured circuit substrates by an optical inspection device, and to be used in optical inspection includes: a step S100 that captures image data on the measured circuit substrate after the kind thereof is changed; a light adjustment area setting step S200 that sets at least one light adjustment area including at least two of a metal kind, character kind and solder mask kind, and a kind corresponding to the one light adjustment area on the basis of the image data; a step S300 that obtains a degree of a difference in corresponding luminance on the basis of a luminance value of the captured image data between any of two kinds of light adjustment areas to select an irradiation light adjustment configuration; and a step S400 that stores the irradiation light adjustment configuration, and is used in inspection of the circuit substrate of the same configuration.;SELECTED DRAWING: Figure 1;COPYRIGHT: (C)2016,JPO&INPIT