WATER ABSORBENT BODY FOR SILICON WAFER AND METHOD FOR DRYING SILICON WAFER USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a water absorbent body for a silicon wafer excellent in water absorption, and a method for drying a silicon wafer in which the water absorbent body is used and a drying process can be shortened.;SOLUTION: A water absorbent body for a silicon wafer is used for being brought into contact with a silicon wafer surface to absorb and remove moisture on the silicon wafer surface, and the water absorbent body is a non-woven fabric made of a polyvinyl alcohol based resin. A method for drying a silicon wafer surface that has been cleaned using a cleaning liquid includes a step of bringing the water absorbent body for a silicon wafer into contact with a silicon wafer surface to absorb and remove moisture on the silicon wafer surface.;COPYRIGHT: (C)2016,JPO&INPIT