GAS PURGE DEVICE, LOAD PORT DEVICE, INSTALLATION BASE OF CONTAINER TO BE PURGED, AND GAS PURGE METHOD

摘要

PROBLEM TO BE SOLVED: To provide a gas purge device that purges inside a container to be purged with cleaning gas until immediately before transportation and prevents generation of a placement failure of the container to be purged that is to be placed, a load port device, an installation base of a container to be purged, and a gas purge method.SOLUTION: The gas purge device detects that a table 14 on which a container 2 to be purged is installed is moved to an undock position, detects stop of feeding cleaning gas, and then moves a purge nozzle 28 in a direction separating from a purge port 5.SELECTED DRAWING: Figure 5A