REDUCTION IN HYSTERESIS EFFECT OF ACCELEROMETER

摘要

PROBLEM TO BE SOLVED: To provide a technique and a device capable of reducing hysteresis in acceleration measurement with an accelerometer assembly by reducing the effect of force and/or strain on the proof mass of the accelerometer assembly.SOLUTION: A technique for manufacturing an accelerometer disclosed herein includes a step for disposing an accelerometer between a first stator and a second stator, the accelerometer being provided with a plurality of elements. In some examples, the plurality of elements include a proof mass, a support structure configured so as to demarcate a plane and support the proof mass, a flexure configured so as to flexibly connect the proof mass to the support structure, and a plurality of raised pads provided with at least one raised pad disposed between the flexure and the outside of the support structure and separably configured. The technique for manufacturing the accelerometer disclosed herein further includes a step for compressing the first and the second stators on the accelerometer, a step for attaching belly-like band media to the first and second stators, and a step for separating at least one raised pad.SELECTED DRAWING: Figure 1