Thermochemical gas sensors and a process for producing the same using chalcogenide-based nanowires

摘要

present invention, the front, comprising a rear surface and side, said the front and porous alumina template having a plurality of pores is provided which penetrates the said rear face, arranged on a rear surface of the porous alumina template, a plurality of pores the cover, and a seed layer having electrical conductivity, in contact with the seed layer exposed through the plurality of pores, and a plurality of chalcogenide-based nano-lines provided in said plurality of pores, in contact with the chalcogenide nano wire porous causing an electrode provided on the front surface of the porous alumina templates with an electrode line which is electrically connected to the electrode, provided on an upper portion of said electrode, an exothermic reaction in contact with the gas to be sensed sex platinum - alumina composite or porous palladium - and a alumina complex, the chalcogenide nano line, Bi _x Te _y (1.5 x 2.5,2.4 y 3.6), Sb _x Te _y (1.5 x 2.5,2.4 y 3.6) or (Bi _1-x Sb _x ) Te ₃ (0 x 1) thermo-chemical gas sensors and consisting of As a method for manufacturing. According to the present invention, the porous platinum responsive to the gas to be sensed - alumina composite or porous palladium - can sense the desired type of diverse gases through changes in alumina composite senses gas temperature appearing by, it is possible to confirm the change in fine electromotive force, it is possible to use in the evaluation of the thermoelectric figure of merit using the gas.FIELD 10