Nanoimprinting with reusable polymer templates with metal or oxide coatings

摘要

Methods and systems are provided for fabricating a polymer-based imprint lithography template having a patterned surface coated with a thin metal or oxide layer. The template exhibits enhanced fluid diffusion and filling (even in the absence of purge gas) and good separation properties and service life. In particular, the method and system for fabricating the oxide-coated version can be performed under atmospheric pressure conditions, thereby enabling lower cost processing and increased throughput. [Selection] Figure 3B