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Nanoimprinting with reusable polymer templates with metal or oxide coatings
Nanoimprinting with reusable polymer templates with metal or oxide coatings
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机译:使用具有金属或氧化物涂层的可重复使用的聚合物模板进行纳米压印
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摘要
Methods and systems are provided for fabricating polymer-based imprint lithography templates having thin metallic or oxide coated patterning surfaces. Such templates show enhanced fluid spreading and filling (even in absence of purging gases), good release properties, and longevity of use. Methods and systems for fabricating oxide coated versions, in particular, can be performed under atmospheric pressure conditions, allowing for lower cost processing and enhanced throughput.
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