Of reference RELATED APPLICATIONS This application optimum wavelength photon emission microscope for the VLSI device, claims the priority benefit of filed on April 10, 2013 US Provisional Application No. 61 / 810,645, all of contents of which are incorporated by reference herein

摘要

step of providing and attaching the DUT to the test bench of the radiation testing machine equipped with an optical detector, comprising the steps of electrically connecting the DUT to the electrical test machine, an electrical test signal while keeping the test parameters constant the DUT If, one of a plurality of short-pass filter continuously inserted into the optical path of the radiation tester, until all available short-pass filter is inserted in the optical path, the radiation test signal from the optical detector acquisition the method comprising a step of performing the steps of determining an appropriate short-pass filter that provides the highest signal-to-noise ratio of the radiated signal, and inserting an appropriate short-pass filter in the optical path, the radiation tests on DUT provides a method for the radiation test of the semiconductor device (DUT) comprising a.FIELD 3