COMPOSITION ANALYSIS METHOD, COMPOSITION ANALYSIS DEVICE, AND COMPOSITION ANALYSIS PROGRAM

摘要

PROBLEM TO BE SOLVED: To find the composition of an element added to a chemical compound with high accuracy by using X-ray spectrometry.SOLUTION: The composition ratio of first and second elements of a chemical compound in which a portion of a first element among the first and second elements of a stoichiometric compound is replaced with an impurity element is found using X-ray spectrometry (steps S1, S2). The first and second elements are such elements that their X-ray absorption to a chemical compound when obtaining mutual characteristic X rays by X-ray spectrometry, for example, can be considered to be approximately the same. The composition of the first element in the chemical compound is found using the composition ratio of first and second elements found for such a chemical compound and the composition of the second element in the chemical compound (step S3), and the composition of the impurity element in the chemical compound is found using the obtained composition of the first element in the chemical compound (step S4).SELECTED DRAWING: Figure 3