Position information detection sensor, a manufacturing method of the position information detection sensor, an encoder, a motor device and a robot device

摘要

PROBLEM TO BE SOLVED: To provide a position information detection sensor capable of size reduction, a manufacturing method for a position information detection sensor, an encoder, a motor device, and a robot device.;SOLUTION: A position information detection sensor includes a first chip on which a light detection part for detecting light via an optical pattern is mounted, and a second chip which is bonded to the first chip in a state that a surface of the second chip faces a surface of the first chip and on which a magnetic field detection part for detecting the magnetic field of a magnetic pattern is mounted.;COPYRIGHT: (C)2013,JPO&INPIT