This paper describes a new force controlled micro-drive end effector and its driving sys-tem,which can realize delicate adjustment according to the information from a force sensor,so as to enhance the effective positioning accuracy of a robot.The active adjustment is actu-ated by a two-dimensional planar linear step motor which can move along X-and Y-axes inthe range from-5mm to +5mm with the resolutions of 0.48μm,1.95μm,7.8μm,and 15.6μm,respectively.The paper presents the modified mechanical structure,the high divisionnumber driving system,the independent force feedback control system,and the macro/micromanipulator system.The theoretical study proves the high dynamic stability of the macro/micro manipulator system.At last,the experimental results of using the system to finish thepeg-in-hole assembly are given.
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