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Method of attaching the vertical probe, the vertical probe manufacturing method and the vertical probe

机译:垂直探针的安装方法,垂直探针的制造方法和垂直探针

摘要

PROBLEM TO BE SOLVED: To provide a vertical probe that prevents damage to vertical probes to be arranged or already arranged when attached to a probe attachment body, and improve accuracy of a leading edge position thereof.;SOLUTION: A vertical probe of the present invention includes: a vertical probe body that has a contact leading edge contacting an electrode of a test body at a leading edge of a linear leading edge part, and is attached to a probe attachment body; and a tab that is removably connected with the vertical probe body, and functions as a knob. The tab has an artificial contact leading edge that is formed at a position on an extension of a straight line of the leading edge part, and is artificially used as the contact leading edge in position control and attitude control using a photographed image.;COPYRIGHT: (C)2014,JPO&INPIT
机译:解决的问题:提供一种垂直探针,该垂直探针在附接到探针附接体时防止损坏要布置或已经布置的垂直探针,并提高其前缘位置的精度。解决方案:本发明的垂直探针包括:竖直探针体,其具有在线性前沿部分的前沿处与测试体的电极接触的接触前沿,并且被附接到探针附接体;突出部与可拆卸地连接到垂直探针主体并用作旋钮。接片具有人造接触前缘,该人造接触前缘形成在前缘部分的直线的延长线上的位置处,并且在使用拍摄图像的位置控制和姿态控制中被人为用作接触前缘。 (C)2014年,日本特许厅&INPIT

著录项

  • 公开/公告号JP5914222B2

    专利类型

  • 公开/公告日2016-05-11

    原文格式PDF

  • 申请/专利权人 株式会社日本マイクロニクス;

    申请/专利号JP20120152934

  • 发明设计人 竹谷 敏永;

    申请日2012-07-06

  • 分类号G01R1/073;H01L21/66;

  • 国家 JP

  • 入库时间 2022-08-21 14:43:34

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