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Composite particle for polishing, method for producing composite particle for polishing, and slurry for polishing
Composite particle for polishing, method for producing composite particle for polishing, and slurry for polishing
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机译:研磨用复合粒子,研磨用复合粒子的制造方法以及研磨用浆料
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摘要
Provided is a composite particle for polishing obtained by supporting a metal oxide on silica particles, which has a high polishing rate and can obtain a smooth polished surface. The half-width of the maximum peak in the X-ray diffraction using the CuKα ray as the radiation source of the metal oxide by the powder X-ray diffraction measurement is 0, which is composed of the composite silica particles having the metal oxide supported on the surface of the silica particles. A composite particle for polishing characterized by an angle of 45 to 1.0 °.
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