Composite particle for polishing, method for producing composite particle for polishing, and slurry for polishing

摘要

Provided is a composite particle for polishing obtained by supporting a metal oxide on silica particles, which has a high polishing rate and can obtain a smooth polished surface. The half-width of the maximum peak in the X-ray diffraction using the CuKα ray as the radiation source of the metal oxide by the powder X-ray diffraction measurement is 0, which is composed of composite silica particles having the metal oxide supported on the surface of the silica particles. A composite particle for polishing characterized by an angle of 45 to 1.0 °.