PRETREATMENT METHOD OF RECOMBINATION LIFETIME MEASUREMENT OF SILICON SUBSTRATE, RECOMBINATION LIFETIME MEASUREMENT METHOD OF SILICON SUBSTRATE, AND PASSIVATION METHOD OF SILICON SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide a pretreatment method which allows for pretreatment in a water soluble environment, and ensures highly reliable measured values when measuring the recombination lifetime for a silicon substrate thus treated.;SOLUTION: In a pretreatment method performed before measuring the recombination lifetime of a silicon substrate, the surface of the silicon substrate is subjected to passivation, by immersing the silicon substrate in ascorbic acid solution.;SELECTED DRAWING: None;COPYRIGHT: (C)2016,JPO&INPIT