Operating method of regenerative gas processing unit, and, regenerative gas processing equipment

摘要

PROBLEM TO BE SOLVED: To reduce the operation cost of a heat storage type gas treatment device by reducing energy consumption for preburn operation.;SOLUTION: While a heater 5a for combustion stops operating after gas treatment operation ends and while high-temperautre residual heat generated in the gas treatment operation still remains in a combustion treatment chamber 5 and at heat capacity parts in heat storage chambers 8, some or all of four or more heat storage chambers 8 are determined as object heat storage chambers 8o to be preburnt, and those object heat storage chambers 8o to be preburnt are linked to a gas send-out path 11 through a changeover valve device 4. In this state, a cleaning gas OA for baking is passed through the object heat storage chambers 8o to be preburnt through the combustion treatment chamber 5 instead of a gas to be treated, and the cleaning gas OA for preburn operation is raised to a necessary baking temperature or higher with the residual heat in the passing process, thereby prebaking the object heat storage chambers 8o to be preburnt.;COPYRIGHT: (C)2014,JPO&INPIT