Process for manufacturing a contactor device and which has a carbon nanotube probe embedded in flexible membrane

摘要

An object of the present invention is to provide excellent dimensional accuracy and stability. A may be used conductive columnar body of entangled carbon nanotubes embedded in an electrically insulating material having a flexible elastic predetermined amount as a conductive contact probe. Columnar body may extend between the two sides of a given amount of material. Terminal of the wiring board, it is possible to extend the columnar body, and may be electrically connected to the electrical interface to the tester controlling the test of the tested device. The physically bound structure pairs can bind a predetermined amount of material on the wiring board. Pair can include a receptacle and the protrusion. .FIELD 1A