NUMERICAL MODEL OF TEMPLATE-BASED CHEMICAL VAPOR DEPOSITION PROCESSES TO MANUFACTURE CARBON NANOTUBES FOR BIOLOGICAL DEVICES

摘要

Carbon nanotubes (CNTs) hold significant promise in the fields of efficient drug delivery and bio-sensing for disease treatment because of their unique properties. In our lab, single and arrayed CNT-tipped devices are manufactured by deposition of carbon on the heated surfaces of templates using chemical vapor deposition (Template-Based Chemical Vapor Deposition, TB-CVD). Experimental results show CNT formation in templates is controlled by TB-CVD process parameters such as flow rate and temperature. However, there is a need for a more comprehensive and low cost way to characterize the flow in the furnace in order to understand how process parameters may affect CNT formation. In this report, 2D and 3D numerical models with Quadrilateral grids were developed using computational fluid dynamic (CFD) commercial codes. Velocity patterns and flow regimes in the tube were compared with experimental data. In addition, statistical techniques were employed to study temperature profiles and velocity patterns in the furnace as a function of flow rate. The outcome of this work will help to elucidate the TB-CVD process and facilitate the efficient manufacture of carbon nanostructures from a variety of templates. The results are broadly applicable to the manufacturing of CNTs and other nanostructured devices used in energy and biomedical fields, including CNT-based devices used in biological applications.