method of manufacturing mirrors with optical waveguides, optical waveguide with a mirror, and light electric composite substrate with mirror

摘要

PROBLEM TO BE SOLVED: To provide an optical waveguide with mirrors etc., capable of performing optical path conversion on an optical signal by the mirrors with small light loss.;SOLUTION: An optical waveguide 9 with mirrors mainly includes a substrate 1, a lower clad layer 2, a core pattern 3, a pair of inclined surfaces 4a, 5a formed at an interval on the core pattern 3, a pair of mirrors 6a, 7a formed of metal layers on the inclined surfaces 4a, 5a, and an upper clad layer 8 on the core pattern 3. A part between the pair of inclined surfaces 4a, 5a is a continuous part 3a which connects without any break. As shown by an arrow A in a first Fig. (b), an optical signal having its optical path converted by the one mirror 6a travels in the continuous part 3a of the core pattern 3 without exiting even once to reach the other mirror 7a, and the optical path is securely converted by the other mirror 7a without passing the optical signal through, so that light loss is small.;COPYRIGHT: (C)2012,JPO&INPIT