Force sensor, force detection device, robot hand, robot, and method of manufacturing force sensor

摘要

PROBLEM TO BE SOLVED: To improve manufacturing efficiency while ensuring accuracy in positioning piezoelectric components in a horizontal direction.SOLUTION: In piezoelectric element holding plates 110 are formed multiple insertion holes 110h. In the insertion holes are respectively inserted guide components 112 each shaped to have a hollow therein. Further, the piezoelectric element holding plates 110 are stacked. Then, through hollow portions of the guide components 112 are respectively inserted pressure bolts 114 so that an upper component 102 is connected to a lower component 104. This allows pressure to be applied to the piezoelectric element holding plates 110 (piezoelectric elements). Each hollow portion of the guide components 112 is arranged to be smaller than an external diameter of the pressure bolts 114 so that inserting the pressure bolts 114 expands the guide components 112 to bring them into contact with the insertion holes. Upon stacking of the piezoelectric element holding plates 110, this arrangement enables the stacking quickly due to space provided between the insertion holes and the guide components. Further, after stacking, this arrangement enables positioning of the piezoelectric element holding plates 110 with good accuracy due to the guide components 112 being expanded by the pressure bolts 114 inserted.