LIGHT INTENSITY DETECTOR, LIGHT INTENSITY DETECTION METHOD, EXPOSURE EQUIPMENT COMPRISING LIGHT DETECTOR, IRRADIATION LIGHT INTENSITY DETECTION METHOD FOR EXPOSURE EQUIPMENT, AND OPTICAL SENSOR SENSITIVITY CALIBRATION METHOD FOR EXPOSURE EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To provide a light intensity detector that increases absolute value accuracy.;SOLUTION: A light intensity detector includes a light-receiving member 101 that is deformed depending on light intensity by making a whole surface or a partial region receive light to be detected, and length measuring means for measuring pre-irradiation length of a part subjected to length measurement and displacement measuring means 118 for measuring post-irradiation displacement of the part subjected to length measurement, within the light-receiving member. Irradiation light intensity is calculated by using at least the pre-irradiation length of the part-subjected-to-length-measurement of the light-receiving member, the post-irradiation displacement, a coefficient of linear expansion of the light-receiving member, and the heat capacity of the light-receiving member.;COPYRIGHT: (C)2016,JPO&INPIT