Aspheric measurement method, a manufacturing method of aspheric measuring device, the optical element processing device and an optical element

摘要

PROBLEM TO BE SOLVED: To calibrate an error of an optical system and highly accurately measure a shape of a measured surface even when a position magnification distribution or an angle magnification distribution is different from a parameter due to the error of the optical system.;SOLUTION: The aspherical surface measurement method guides light reflected on the measured surface having an aspherical surface to a light reception sensor via the optical system. The method comprises: calculating the position magnification distribution and the angle magnification distribution between the light reception sensor and a sensor conjugate surface; measuring a first wave front on the light reception sensor of reflection light on a reference surface using a sensor output; calculating a second wave front of light on the light reception sensor reflected on the reference surface using the parameter of the optical system; calibrating by moving a movable part such that a difference of a rotation symmetry component between the first and second wave fronts becomes small; measuring, after the calibration, a third wave front and fourth wave front on the light reception surface of light reflected on the reference surface and the measured surface using a sensor output; and calculating the shape of the measured surface using the third and fourth wave fronts, the position magnification distribution and the angle magnification distribution, and a shape of the reference surface.;COPYRIGHT: (C)2013,JPO&INPIT