Aspheric measurement method, a manufacturing method of aspheric measuring device, the optical element processing device and an optical element

摘要

PROBLEM TO BE SOLVED: To collectively measure the shape of an aspherical surface whose curvature change is large in the radial direction.;SOLUTION: In the aspherical surface measurement method, light from a light source 1 is irradiated to surfaces to be inspected 9 to 11 which are aspherical surfaces as illumination light of a spherical wave through an illumination optical system 5, reflected light at the surface to be inspected is introduced to a light-receiving sensor 8 through an imaging optical system 7 as detection light, and the shape of the surface to be inspected is measured using the output from the light-receiving sensor. In the method, a curvature of a wavefront of the illumination light, and an exit pupil of the imaging optical system, having the light-receiving sensor as an object surface, are formed in such a manner that the absolute value of the angle of the detection light is smaller than the maximum value of the absolute value of the angle of peripheral rays of the imaging optical system. Furthermore, a sensor conjugate surface, which is in a conjugate relation with the light-receiving sensor by the imaging optical system, is made to have a curvature and to be in a position in which rays of the detection light do not intersect on the sensor conjugate surface. The sensor conjugate surface, the wavefront of the illumination light, and the surface to be inspected are all aligned to either a convex surface or a concave surface directing the same side in the optical axis direction.;COPYRIGHT: (C)2013,JPO&INPIT