Field electron emission film, field emission device, the light-emitting element and a method of manufacturing

摘要

PROBLEM TO BE SOLVED: To provide a field electron emission film capable of operating with low power, and exhibiting high uniformity of brightness in the light-emitting surface, and to provide a field electron emission element using the same, a light-emitting element, and their manufacturing method.SOLUTION: A field electron emission film contains 60-99.9 mass% of tin-doped indium oxide, and 0.1-20 mass% of carbon nanotubes, in which grooves having a width in a range of 0.1-50 μm are formed on the surface of the film, with a total extension of 2 mm or more per 1 mmand an area ratio of the groove part in a range of 2-60%. The field electron emission film has such a structure that carbon nanotubes are exposed on the wall surface of the grooves. After forming an ITO film containing carbon nanotubes on a substrate, grooves are formed on the surface of the ITO film, and the end part of the carbon nanotube exposed to the wall surface of the groove serves as an emitter.