Prediction method of the power generation performance of the solar cell manufacturing process, as well as optimization method and the abnormality detection method in the manufacturing process using the same

摘要

PROBLEM TO BE SOLVED: To provide a prediction method of power generation performance in the manufacturing process of solar cell which allows for detection of process abnormality by predicting the power generation performance of a solar cell after production, during formation of the power generation layer of a solar cell or at the stage of after formation, and shortening the optimization time of process conditions.;SOLUTION: A solar cell module substrate (with a plurality of transparent electrodes) is prepared, and a power generation layer is formed thereon (step S1). Subsequently, this semiconductor element (substrate) is irradiated with two kinds of pump light (light having energy more than and less than the prohibition band width (band gap) of the power generation layer) (step S2). Thereafter, the currents (I_vis and I_nir) between the adjoining transparent electrodes responding to the two kinds of pump light are measured (step S3), and the photocurrent ratio (I_vis/I_nir) is calculated (step S4). From this photocurrent ratio (I_vis/I_nir), the curve factor (FF) and the generation efficiency of a solar cell after production are predicted (step S5).;COPYRIGHT: (C)2014,JPO&INPIT