Spectral characteristic measuring device, the spectral characteristic measuring method, a planar object to be measured quality monitoring equipment

摘要

PROBLEM TO BE SOLVED: To provide a spectral characteristic measuring device which utilizes measurement results of a displacement sensor using a spectrograph.;SOLUTION: A spectral characteristic measuring device 10 measures spectral characteristics of a field of measurement of a planar measuring object, comprises a displacement sensor equipped with: a light source unit 200 which irradiates light whose wavelength varies depending on an emission direction to be generated by obliquely making the light incident on an optical element using a dielectric multilayer film at a fixed angle by a light source optical axis in an oblique direction to a surface including the field of measurement; a spectrograph 300 which measures spectral distribution of reflected light in the field of measurement; a feature quantity extraction part 120 which extracts feature quantities of the spectral distribution; and a displacement calculation part 130 which calculates displacement of the field of measurement based on the extracted feature quantities, and relation between the preliminarily acquired feature quantities and the displacement, and corrects the measured spectral characteristics by utilizing measurement results of the displacement sensor.;COPYRIGHT: (C)2015,JPO&INPIT