DISPLACEMENT SENSOR, SPECTRAL CHARACTERISTIC MEASURING APPARATUS, COLOR MEASURING APPARATUS, PLANAR MEASURED OBJECT QUALITY MONITORING APPARATUS, DISPLACEMENT MEASURING METHOD, SPECTRAL CHARACTERISTIC MEASURING METHOD, AND COLOR MEASURING METHOD

摘要

A displacement sensor includes a light source unit configured to apply light with different plural wavelengths in a direction oblique to a measurement region of a planar measured object, a spectroscope configured to measure spectral distribution of light reflected by the measurement region, a feature amount extracting module configured to extract a feature amount of the spectral distribution, and a displacement calculating module configured to calculate displacement of the measurement region based on the extracted feature amount and a relation between displacement and a feature amount acquired previously.