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Method for reducing the stray field of the rotating equipment for the stray field or the vacuum pump and / or vacuum pump for the vacuum pump centered
Method for reducing the stray field of the rotating equipment for the stray field or the vacuum pump and / or vacuum pump for the vacuum pump centered
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机译:减小用于杂散场或真空泵和/或用于真空泵的真空泵的旋转设备的杂散场的方法
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摘要
The method involves forming a permanent magnet bearing for the mutual rotary mounting of a rotor (16) and a stator. The material-specific properties of the permanent magnetic bearing are changed based on the eccentricity state to change the bearing for reducing the magnetic field generated eccentricity. The eccentricity is measured and the change is made dependent on the measured eccentricity such that the eccentricity is reduced. The material is removed to change the magnetic field. Independent claims are included for the following: (1) a vacuum pump; and (2) a device for of centering of vacuum pump e.g. turbo molecular pump, or rotary unit.
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