Concentration measuring method of ultra-pure water of trace amounts of hydrogen peroxide

摘要

PROBLEM TO BE SOLVED: To provide a method for measuring the concentration of hydrogen peroxide, which is highly accurate and highly reliable.;SOLUTION: In the method for measuring the concentration of hydrogen peroxide including a water sample electric titration process for introducing a water sample separately acquired from a pipe of a pure water manufacturing device to a coulometric titration cell through a first pipe to measure hydrogen peroxide concentration by electric titration, and a reference water electric titration process for introducing reference water made of water that does not substantially include hydrogen peroxide through a second pipe to the coulometric titration cell to measure hydrogen peroxide concentration by electric titration, and corrects a measurement result in the water sample electric titration process with a measurement result in the reference water electric titration process to calculate hydrogen peroxide concentration in the water sample, a common heat exchanger for conducting heat from the pipe having higher temperature to the pipe having lower temperature is placed halfway between the first pipe and the second pipe to measure the concentration of a micro amount of hydrogen peroxide.;COPYRIGHT: (C)2013,JPO&INPIT