首页>
外国专利>
Time Multiplexed Electrodes in MEMS Inertial Sensors
Time Multiplexed Electrodes in MEMS Inertial Sensors
展开▼
机译:MEMS惯性传感器中的时间复用电极
展开▼
页面导航
摘要
著录项
相似文献
摘要
In certain exemplary embodiments of the present invention, rather than having two or more electrodes connected to separate bond pads for making electrical connections to separate electrical circuits to perform various electrode functions (e.g., a drive electrode for performing a drive function and a sense electrode for performing a sense function as in FIG. 1), a common electrode that can perform multiple electrode functions is electrically connected to a single bond pad, with the two electrical circuits connected to the single bond pad. The two electrical circuits are then time-multiplexed so that the electrode can be used for both electrode functions. Among other things, such an arrangement reduces the number of bond pads and therefore allows for reduction of the size of the MEMS die.
展开▼