Method And Apparatus Determining An Amount of Phosphine (PH3) In An Atmosphere of An Enclosed Area

摘要

A process is provided for determining the amount of phosphine gas in the atmosphere of an enclosed area that has been fumigated with phosphine (PH₃). This process comprises: (A) sampling said atmosphere of said enclosed area to obtain a gaseous sample; (B) selectively removing water from said gaseous sample by passing said gaseous sample through an evaporation zone to obtain a dry sample, wherein said evaporation zone comprises a copolymer of tetrafluoroethylene and perfluoro-3,6-dioxa-4-methyl-7-octene-sulfonic acid; and (C) analyzing said per-evaporated sample in a detector to determine the amount of phosphine gas in said dry sample. The process allows for heretofore unattained capability of monitor measurements of phosphine gas (PH₃) up to 1% (10,000 ppm).