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CAPACITIVE MICROELECTROMECHANICAL SWITCHES WITH DYNAMIC SOFT-LANDING
CAPACITIVE MICROELECTROMECHANICAL SWITCHES WITH DYNAMIC SOFT-LANDING
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机译:具有动态软着陆功能的电容式微机电开关
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摘要
A microelectromechanical system (MEMS)-based electrical switch. The electrical switch includes a moveable electrode, a dielectric layer positioned adjacent the moveable electrode on a first side of the dielectric layer and spaced apart from the moveable electrode when the moveable electrode is in an inactivated position and in contact with the moveable electrode when the moveable electrode is in an activated position, and a substrate attached to the dielectric layer on a second side opposite to the first side, the moveable electrode is configured to brake prior to coming in contact with the dielectric layer when the moveable electrode is switched between the inactivated state and the activated state.
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