首页> 外国专利> METHODS OF FORMING AN ORGANIC SCATTERING LAYER, AN ORGANIC LIGHT EMITTING DIODE WITH THE SCATTERING LAYER, AND A METHOD OF FABRICATING THE ORGANIC LIGHT EMITTING DIODE

METHODS OF FORMING AN ORGANIC SCATTERING LAYER, AN ORGANIC LIGHT EMITTING DIODE WITH THE SCATTERING LAYER, AND A METHOD OF FABRICATING THE ORGANIC LIGHT EMITTING DIODE

机译:形成有机散射层的方法,具有散射层的有机发光二极管以及制造有机发光二极管的方法

摘要

Provided is a method of fabricating an organic scattering layer. The method may include providing a deposition apparatus with a reaction chamber and a source chamber, loading a substrate in the reaction chamber, supplying carrier gas into the source chamber that may be configured to supply an evaporated organic source material into the reaction chamber, a temperature of the carrier gas ranging from 25° C. to 50° C., and spraying the carrier gas and the evaporated organic source material into the reaction chamber through a showerhead to deposit an organic scattering layer on the substrate, the organic scattering layer including organic particles, which may be provided in a molecularized form of the evaporated organic source material, and thereby having an uneven surface.
机译:提供一种制造有机散射层的方法。该方法可以包括:提供具有反应室和源室的沉积设备;在反应室中装载基板;将载气供应到源室中,该载气可以被配置成将蒸发的有机源材料供应到反应室中;在25℃至50℃的范围内,将载气和蒸发的有机原料通过喷淋头喷入反应室中以在基板上沉积有机散射层,该有机散射层包括有机颗粒可以以蒸发的有机源材料的分子化形式提供,从而具有不平坦的表面。

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